表面电阻率测试标准

1 Purpose:

目 的：

1.1To define the requirements and procedures of surface resistivity test.

本文旨在定义表面电阻测量的要求和步骤。

2 Scope:

范围：

2.1The test method described in the document cover directcurrent procedures for the determination of D

C surface resistance and surface resistivity of electrical materials.

本方法用来测量电气材料的直流表面电阻，表面电阻率。

2.2This document shall be applicable to solid materials and products used and/or produced byPE AK, except of metal materials

本规范适用于必佳公司内生产及使用的,除金属材料外，其它固体材料及产 品的表面电阻和/或表面电阻率的测试。

3 Instrument ：

测试仪器

3.1MCPHT260 Resistivity meter

MCPHT260型电阻率测试仪

3.2Model PSI870 Surface Resistance/Resistivity Indicator

PSI870 型 表面电阻/表面电阻率测试仪

3.3PRF912 miniature concentric ring fixture

PRF912型微型同心环型电极

3.4SRM110 Surface Resistivity Meter

SRM110 型表面电阻率测试仪。

4 External Reference documents:

外部参考文件：

4.1ASTM D25793 ：Standard test methods for DC resistance or conductance of insulating materials

绝缘材料的直流电阻或电导实验方法

4.2ASTM D4496: Test method for DC resistance or conductance of moderately conductive materials

中等导电材料的直流电阻或电导实验方法。

5 Definitions

定 义

5.1 Moderately conductiveDescribe a solid material having a volume resistivity

between 1 and 10,000,000 ohmcm.

中等导电性：指固体材料的体积电阻率在1010,000,000 ohmcm

5.2Surface resistance (Rs) The ratio of the DC voltage applied to the two electrodes ( on the surface of a sp ecimen) to the current betweenthem. expressed in ohm.(symbol is Ω)

表面电阻(Rs)施加在试样表面上两电极间的直流电压与通过两电极间的电流的比值 ；单位是欧姆（o hm,）符号 Ω

5.3 Surface resistivity (ρs) the surface resistance multiplied by that ratio of the specimendimensions (wid th of electrodes defining the current path divided by the distance between electrodes) which transforms th e measured resistance to that obtained if the electrodes had formed the opposite sides of a square.Remarks:Surface resistivity is expressed in ohms. It is popularly expressed also as ohms/square.(the size o f the square is immaterial).

表面电阻率(ρs)平行于材料表面上电流方向的电位梯度与单位宽度上的电流之比。

注： 表面电阻率的单位是欧姆（ohm, Ω），通常也写为欧姆/平方面积 （ohms/square）， 此处平方面积的大小是非实质的量。

6 General Requirements:

总体要求：

6.1The lab assistant involved in the measurement shall be trained and certified. 实验人员应培训合格方可作业。

6.2 Unless otherwise specified，the minimumsample quantities shall be 3 pieces and 3 points on each sa mple.

除非特别要求，最少3个测试样品, 每个样品测3个点。

6.3 Both sides/surfaces of samples shall be tested

样品的两面 都应进行测试。

6.4 Unless otherwise specified, Before test starting , sweep off dirt , dust , sweat stains and other contami nationon sample surface with a piece of cleansoft cloth. 除非另有要求，测试前，用干净软布擦去样品表面的脏物，灰尘和汗等。 7 Test specimens

实验样品。

7.1The specimen may be of any practical form consistent with the particular objective, such as flat plates, t apes or tubes.

试样可为任何实际的形状，如平板，带状或管状。

7.2Aminimum of three specimens is required.

每种材料最少需要测三个样品。

8 Conditioning.

状态调节

8.1Unless otherwise specified or required, the specimen shall be conditioned under the condition of 23±2ºC and 50±5%RH.

除非另有要求或说明，测试前试样应在温度23±2ºC，相对湿度50±5%的 条件下进行状态调节。

9 Test Procedure for MCP HT260

使用MCP HT260的测试 步骤：

9.1 Operation environment for the instrument is: temperature: 0 ~40°C, relative Humidity below 80%.

本仪器可适应的实验环境条件是：温度0°C 40°C，相对湿度小于80%。

9.2 Turn on power switch

打开电源开关。

9.3 Push [PROBE] key to set probe type as HRS. Each time key is pushed probe

type indicator change. HRS turns on，at the same time resistivity correction factor 10.09 shows in data indi cator. press [ENTER] key to finish the setting 按[PROBE]键设置探针类别为HRS：每按一次[PROBE]键，探针类别改变 一次。HRS点亮。同时电阻校正因子10.09显示在数据显示器上，按 [ERTER]键结束设置。

9.4 Push [TIMER] Key to set test time. Generally choose 10 seconds.

按[TIMER]键设置测试时间,通常设为10秒。

9.5 Push [SPLY VOLT] key to select supplied voltage. Each time key is pushed, supplied voltage indicator cha nged accordingly. refer to Table 1 to select a suitable voltage:按[SPLY VOLT]键设定测试电压。参照表1选择合适的测试电压。

9.6 Push [AUTO/MANUAL] key，select measuring range mode.by key.

按[AUTO/MANUAL]

键,

用 和 9.6.1 Generally use “AUTO” mode. 通常选择“自动”(AUTO)模式.

Table 1: Test Voltage and Effective Measuring Range. Measurement in auto mode first to get the whole ran ge of surface resistivity of the material

手动（MANUAL）模式下可设定最合适的测量范围。但首先应在自动 模式下进行测试,以获得材料表面电阻的最大范围。

9.7 Push [SINGL PRNT] key to set print mode. Select single print mode .each time measuring is complete d, measuring data is print out.

按[SINGL PRNT]键设定打印方式,选择单次打印方式（SINGLE），每次测量完成，数据即被打印出来。

9.8 Push [UNIT] key to select Ω/□as measuring unit.

按[UNIT]键择Ω/□为测量单位。

9.9 Place the sample on the insulative side of support plate, then press the MCP probe against sample to e nsure the surface of electrode and sample in fully and intimately contact.

把待测样品平放在垫板的绝缘的一面上，然后，把MCP 电极放在样品表 面上，施加一定的力使电极表面与样品表面紧密接触。

9.10 Push [START/HOLD] key, measurement start, the “MEASURE ‘lights on and twinkles during measurem ent.

按下[START/HOLD]键，测量开始，“MEASURE”(测量) 灯亮并在测量过 程中持续闪烁。

9.11 During measurement, S.R data is indicated at measured data indicator.

测量期间，表面电阻率值显示在测试值指示器上。

9.12 Measuringresult is automatically printed out after measurement.

测量结束后，结果自动打印出来。

9.13 Repeat step 9.99.12 to start another test..

重复9.99.12进行下一次测量。

9.14 Turn off the power when test finished.

实验结束后， 关闭仪器电源。

10 Test Procedures for SRM110

使用SRM110的测试过程

10.1 General description.

一般性说明

10.1.1 Table 2 detailed the readings and corresponding effective measurement range of SRM110.

SRM110的读数及相应的有效测量范围见表2

Table 2 Readings and corresponding effective measurement range of SRM110

表2 SRM110的读数及相应的有效测量范围

10.1.2 When power on the meter, check if the battery of the meter is fully

charged or not. If the low battery indicator lamp is on（refer to fig.2）. It need to be recharged Please rech arge it with supplied charger for about 12 hours. in advance (refer to the SRM manual for recharging time o f the

battery) and it can not be used during charging.

打开电源后，观 察电能是否充足：如电池电量指示灯亮（参见图

2）， 表示电量不足。应先使用指定的充电充电器充电约12小时，然 后使用。不可以边充电边使用。

10.2 Place specimens on aninsulative flat surface.

把待测试样放在一绝缘平台上。

10.3 Switch on the Surface Resistivity Meter (SRM) and place it on the specimen. as

indicated on Figure 1,And then check the readings on the SRM

打开电阻测试仪(SRM)开关，把它放在样品上（如图1），测试样品表面 电阻，看SRM上显示的读数。

Fig. 1: Demonstration of surface resistivity test

图 1：表面电阻率测试示意图

10.4 During the test, be sure that the parallel bar or the foot（electrodes） of the

SRM is fully and intimately contact with the sample surface. Refer Figure 2. 测试时，电阻测试仪支脚（电极）一定要与黑盒表面充分，紧密接触，参

图 2：表面电阻率测试示意图II

10.5 If necessary, record the readings of the SRM110 in the data record sheet.

必要时，将电阻仪的读数记录在数据记录单上。

11 Test Procedures for PSI870

使用PSI870 的测试步骤。

11.1 General description of PSI870

PSI870的一般性说明。

11.1.1 Figure 3 detailed the name

of each part of the instrument.

图 3 给出了仪器各部分的名称。.

11.1.2 The PSI870 has eleven (11)

LED’s provide resistance ( lower scale) and resistivity (upper scale) measurement indication in one decade increments.

PSI870有 11个 LED 灯指示表面电

阻（下排刻度）和表面电阻率

（ 上排刻度 ） 的测试结果 ，

相连两个刻度间相差一个数量级

（十进位）。 Figure 3: Demonstration of PSI8 图 3： PSI870 简 图11.1.3 The decade changeover point from one decade to another is ± 1/2 n decade on logarithmic scale, i.e, 3.16x10 . see table 3 for detail ..

从一个数量级到下一个数量级的转变点为对数坐标上十进位点的± 1/2处，

n 即3.16x10 ,表3 给出了详细范围。

Table 3 Readings and corresponding effective measurement range ofPSI870

11.1.4 Instrument resolution is one order of magnitude.

本仪器的分辨率是一个数量级。

11.2 Initial Operational Check

初始操作检查

11.2.1 Once a new battery is installed in the PSI870,or each time the instrument is used, and whenever th

e instrument’s performance or battery function are in question, check its initial function as follows.

在安装了新电池，每次使用前，或对仪器性能，电池功能有疑问时， 依以下步骤检查仪器的基本功能。

11.2.2 Place the instrument, with electrodes down, on a clean metal flat plate.

Measure the resistance of the plate using the operation procedures A described in next paragraph.

电极向下，把仪器放在一干净的金属平板上。测试此平板的表面电 阻。

3 2 11.2.3 If the lowest decade LED(10 onUPPER scale and 10 on LOWER scale)

does not light, the unit is not functioning properly or the battery is dead. Otherwise it indicates a very “con ductive” material measurement.

3 2 如果电阻最小LED指示灯（上排10 ，下排10 ）不亮，说明仪器不正

常或电池没电）。反之说明材料是非常导电的。此项检查合格。

11.2.4 Place the instrument, with electrodes down, on a clean plastic insulating flat

plate .Measure the resistance of the plate .

电极向下，把仪器放在一干净的绝缘塑料平板上，测试其表面电阻。 11.2.5If the RED LED located at t he right end of the scale briefly, then the RED center panel “Exceeds PSI870 Range” LED should light. This i ndicates a very high resistance “insulative” material measurement. Otherwise it means the unit is not funct ioning properly, or the battery is dead.

若刻度最右端的红色LED灯闪一下，然后前面板中心的“超出PSI870 范围“（Exceeds PSI870 Range）红色LED灯亮。说明测量的是绝缘材 料。此项检查合格。反之， 说明仪器功能不正常或电池没电。

11.2.6 If the initial operational check is ok, then proceed to measurement

procedures. Otherwise, change battery or have authorized personnel check and fixed the problem.

若上述检查合格，则可以进行测量操作。否则，更换电池或让指定人 员检查并修复仪器。

11.3 ProcedureA: measure the surface resistivity with the brass bar electrodes.

方法 A： 用条状铜电极测量表面电阻。

11.3.1 Place the sample to be measured on an insulative flat surface

把待测样品放在一绝缘平面上。

11.3.2 Place the electrode switch on top of the equipment to the ”ELECTRODES OFF” position.（right side） 把仪器顶部的电极选择开关放在“ELECTRODES ON“位置上（右 边）

11.3.3 Place the PSI870 on the surface to be measured, electrodes down against the test material. Make su re the electrode switch is in the ”ELECTRODES ON” position.

使电极与待测面相对，把PSI870 放在待测样品上。

11.3.4 Apply an proper and balanced force by hand，so that the full length of each electrode is making eve n contact with the sample surface. Otherwise a measurement error of up to one magnitude may occur

用手施加适当的且平衡的力，使电极长度方向上各处与样品表面均匀 接触。否则，引起的测试误差可能会达到一个数量级。

11.3.5 Place your index finger directly on the GREEN “Press to Test “ button and pushing the “Press to Tes t” button.

用食指按下前面板上绿色的开始测试按钮（Press to Test）。

11.3.6 Continue applying steady pressure until one LED remains on, indicting a stable measurement.( Appr oximately 5 seconds)。

保持一稳定的压力直至有一个LED灯持续亮起（约5 秒钟）

11.3.7 Read the LED indication from the UPPER scale to get surface resistivity ohms/square.

读LED指示灯上排的刻度得到表面电阻率值。

11.3.8 Read the LED indication from the LOWER scale to get surface resistance in ohms.

读LED指示灯下排的刻度得到表面电阻值。

11.4 ProcedureB: measure surface resistivity with the PRF912 micro probe

方法B；用PRF912微型电极测试表面电阻率

11.4.1 Connect the additional test cable to PRF912 by BNC connection system： Locate the 2 locking studs o n the fixture’s male connector. Match them to grooves of the female connector. Then simply push and twi st the female connector clockwise until it locks on to the fixture.

Refer to fig3.

用同轴电缆插头把附加电缆线与PRF912连接好：把电极接线端子上的2

子上的槽对齐，然后往里推并顺时针旋转电缆的端子直到它与电极锁紧。 连接方法参见图3. Fig.3 Connect additional cable to PRF912’s BNC fixture

图3：附加电缆与PRF912电极的连接

11.4.2 Place the electrode switch on top of the equipment to the ”ELECTRODES OFF” position.

把仪器顶部的电极选择开关拨到左边“ELECTRODES OFF“位置。 11.4.3 Insert one lead of the cable into e ach input jack of the resistance reference input & Auxiliary connections at the top end of the unit.

把电缆的两个接线头分别插入仪器顶部的辅助插孔内。

11.4.4 Place the PRF912 vertically on the test area and lower it until the spring loaded center electrode ma kes direct contact with the material under test..

把PRF912 电极垂直放到待测表面上,使其中心电极与试样表面接触。 11.4.5 Apply sufficient pressure o n the probe until the center and outer spring loaded electrode are partially compressed while in contact wi th the test material. This will insure reproducible measurement

对电极施加足够的力,使内外弹簧电极都部分受压，且与待测材料表面 接触。以保获得可重复的测试结果。

11.4.6 Hand held the PSI870, , then push the green “Press to Test” button on the front of the panel.. Note : being careful not to touch the brass electrodes by your body or materials. During the test mode, otherwis e the indicated reading may be affected.

手持PSI870，按下前面板上绿色的开始测试按钮（Press to Test） 注意：在这种测试模式下， 不要使身体或其它材料与铜电极接触。否 则会影响测试结果。

11.4.7 Continue pushing the “Press to Test “ button until one LED remains on, indicating a stable measure ment.(about 5 seconds).

保持一稳定的压力直至有一个LED灯持续亮起（约5 秒钟）

11.4.8 Read the LED indication from the UPPER scale to get surface resistivity ohms/square.

读LED指示灯上排的刻度得到表面电阻率值。

11.4.9 Read the LED indication from the LOWER scale to get surface resistance in ohms.

读LED指示灯下排的刻度得到表面电阻值。

11.5 Procedure C measurement of point to point resistance.

方法C测量两点之间的表面电阻

11.5.1 Connect the additional test cable to standard banana plug through BNC connectors. Refer to 11.6.1 f or connection procedure.

把附加测试电缆与香蕉插头通过同轴电缆插座连接好，连接方法参考 11.6.111.5.2 Other fixtures, NFPA electrodes, extended leads, clips or clamps can be connected to above assembl y to measure general resistance of other materials.

可把其它的电极，导线，夹子等与上述组件连接进行测试。

11.5.3 Place the electrode switch on top of the equipment to the ”ELECTRODES OFF” position.

把仪器顶部的电极选择开关拨到左边“ELECTRODES OFF“位置。 11.5.4 Insert one lead into each input ja ck of the “resistance reference input & Auxiliary connections” at the top end of the unit,

把电缆的两个接线头分别插入仪器顶部的辅助插孔内。

11.5.5 Position the plugs directly over test area ,apply appropriate pressure on the plugto insure the two ti ps of the plug are in intimate contact with the test material. This will insure reproducible measurement. 把插头放到待测试样表面并施加适当的力， 使插头的两脚与试样紧密 接触，以保获得可靠的测试结果。

11.5.6 Hand held the PSI870,being careful not to touch the brass electrodes, then push the “Press to Tes t” button on the front of the panel.

手持PSI870，按下前面板上绿色的开始测试按钮（Press to Test） 注意：在这种测试模式下， 不要使身体或其它材料与铜电极接触。否 则会影响测试结果。

11.5.7 Continue pushing the “Press to Test “ button until one LED remains on, indicating a stable measure ment.(about 5 seconds).

保持一稳定的压力直至有一个LED灯持续亮起（约5 秒钟）

11.5.8 The resistance in Ohms between the two tip points is read from the UPPER scale above the LED’s. Note; The UPPER scale unit of measure in this Rtt measurement mode is ohms, not ohms/sq.

指示灯上排的刻度（读数）即两点之间的表面电阻。单位欧姆（ohm,Ω） 注意：在测量两点间的表面电阻时，LED指示灯上排刻度的单位是欧姆 （ohm,Ω）.

12 Test Report

测试报告

12.1 Following information shall be included in the formal test report at least.

正式的测试报告至少包括以下内容

12.1.1 A description and identification of the material.

材料说明，如名称，牌号，制造商，颜色等。

12.1.2 Shape and dimensions of the test specimen

样品形状及尺寸

12.1.3 Type of test instrument.

测试仪器的型号。

Conditioning of the specimen.（hours at humidity and temperature, etc.） 试样的状态调节情况（温湿度处理条件等）

12.1.4 Test conditions and parameters .

测试条件及参数。

12.1.5 Measured values of surface resistance and/or resistivity.

表面电阻和/或电阻率的测试值。

13 Others

其它

13.1 For more information on, please refer to the respective operation manual of each instrument.

更为详细的说明， 请参考各仪器的操作说明。

surface resistivity

平行于通过材料表面上电流方向的电位梯度与表面单位宽度上的电流之比，用欧姆表示。

注：如果电流是稳定的，表面电阻率在数值上即等于正方形材料两边的两个电极间的表面电阻，且与该正方形大小无关。

是指表示物体表面形成的使电荷移动或电流流动难易程度的物理量。在固体材料平面上放两个长为L、距离为d的平行电极，则两电极间的材料表面电阻Rs与d成正比，与L成反比，可用下式表达：

表面电阻率计算公式式中的比例系数ρs称作表面电阻率，它与材料的表面性质有关，并随周围气体介质的温度、相对湿度等因素有很大变化，单位用Ω（欧）表示。